Reverse nanoimprint lithography for fabrication of nanostructures

10.1166/nnl.2012.1424

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Bibliographic Details
Main Authors: Tavakkoli, A.K.G., Ranjbar, M., Piramanayagam, S.N., Wong, S.K., Poh, W.C., Sbiaa, R., Chong, T.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/57272
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-572722023-10-27T09:17:57Z Reverse nanoimprint lithography for fabrication of nanostructures Tavakkoli, A.K.G. Ranjbar, M. Piramanayagam, S.N. Wong, S.K. Poh, W.C. Sbiaa, R. Chong, T.C. ELECTRICAL & COMPUTER ENGINEERING Molding Pressure Nanofabrication Residual Layer Reverse Nanoimprint Lithography 10.1166/nnl.2012.1424 Nanoscience and Nanotechnology Letters 4 8 835-838 2014-06-17T03:04:17Z 2014-06-17T03:04:17Z 2012-08 Article Tavakkoli, A.K.G., Ranjbar, M., Piramanayagam, S.N., Wong, S.K., Poh, W.C., Sbiaa, R., Chong, T.C. (2012-08). Reverse nanoimprint lithography for fabrication of nanostructures. Nanoscience and Nanotechnology Letters 4 (8) : 835-838. ScholarBank@NUS Repository. https://doi.org/10.1166/nnl.2012.1424 19414900 http://scholarbank.nus.edu.sg/handle/10635/57272 000309496400012 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Molding Pressure
Nanofabrication
Residual Layer
Reverse Nanoimprint Lithography
spellingShingle Molding Pressure
Nanofabrication
Residual Layer
Reverse Nanoimprint Lithography
Tavakkoli, A.K.G.
Ranjbar, M.
Piramanayagam, S.N.
Wong, S.K.
Poh, W.C.
Sbiaa, R.
Chong, T.C.
Reverse nanoimprint lithography for fabrication of nanostructures
description 10.1166/nnl.2012.1424
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Tavakkoli, A.K.G.
Ranjbar, M.
Piramanayagam, S.N.
Wong, S.K.
Poh, W.C.
Sbiaa, R.
Chong, T.C.
format Article
author Tavakkoli, A.K.G.
Ranjbar, M.
Piramanayagam, S.N.
Wong, S.K.
Poh, W.C.
Sbiaa, R.
Chong, T.C.
author_sort Tavakkoli, A.K.G.
title Reverse nanoimprint lithography for fabrication of nanostructures
title_short Reverse nanoimprint lithography for fabrication of nanostructures
title_full Reverse nanoimprint lithography for fabrication of nanostructures
title_fullStr Reverse nanoimprint lithography for fabrication of nanostructures
title_full_unstemmed Reverse nanoimprint lithography for fabrication of nanostructures
title_sort reverse nanoimprint lithography for fabrication of nanostructures
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/57272
_version_ 1781781375722979328