Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators
10.1116/1.3556954
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sg-nus-scholar.10635-573422023-10-30T10:26:40Z Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators Xie, J. Lee, C. Wang, M.-F. Feng, H. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.3556954 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 29 2 - JVTBD 2014-06-17T03:05:05Z 2014-06-17T03:05:05Z 2011-03 Article Xie, J., Lee, C., Wang, M.-F., Feng, H. (2011-03). Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 29 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1116/1.3556954 10711023 http://scholarbank.nus.edu.sg/handle/10635/57342 000289166000036 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1116/1.3556954 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Xie, J. Lee, C. Wang, M.-F. Feng, H. |
| format |
Article |
| author |
Xie, J. Lee, C. Wang, M.-F. Feng, H. |
| spellingShingle |
Xie, J. Lee, C. Wang, M.-F. Feng, H. Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators |
| author_sort |
Xie, J. |
| title |
Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators |
| title_short |
Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators |
| title_full |
Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators |
| title_fullStr |
Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators |
| title_full_unstemmed |
Seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators |
| title_sort |
seal and encapsulate cavities for complementary metal-oxide-semiconductor microelectromechanical system thermoelectric power generators |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/57342 |
| _version_ |
1781781391446376448 |