Spot focus size effect in spectroscopic ellipsometry of thin films

Spot focus size effect in spectroscopic ellipsometry of thin films

10.1016/j.optcom.2008.09.081

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Bibliographic Details
Main Authors: Ng, T.W., Tay, A., Wang, Y.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Ellipsometry
Geometrical optics
Wafer film
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57497
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Institution: National University of Singapore
id sg-nus-scholar.10635-57497
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spelling sg-nus-scholar.10635-574972023-10-26T08:23:05Z Spot focus size effect in spectroscopic ellipsometry of thin films Ng, T.W. Tay, A. Wang, Y. ELECTRICAL & COMPUTER ENGINEERING Ellipsometry Geometrical optics Wafer film 10.1016/j.optcom.2008.09.081 Optics Communications 282 2 172-176 OPCOB 2014-06-17T03:06:51Z 2014-06-17T03:06:51Z 2009-01-15 Article Ng, T.W., Tay, A., Wang, Y. (2009-01-15). Spot focus size effect in spectroscopic ellipsometry of thin films. Optics Communications 282 (2) : 172-176. ScholarBank@NUS Repository. https://doi.org/10.1016/j.optcom.2008.09.081 00304018 http://scholarbank.nus.edu.sg/handle/10635/57497 000261852400005 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Ellipsometry
Geometrical optics
Wafer film
spellingShingle Ellipsometry
Geometrical optics
Wafer film
Ng, T.W.
Tay, A.
Wang, Y.
Spot focus size effect in spectroscopic ellipsometry of thin films
description 10.1016/j.optcom.2008.09.081
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Ng, T.W.
Tay, A.
Wang, Y.
format Article
author Ng, T.W.
Tay, A.
Wang, Y.
author_sort Ng, T.W.
title Spot focus size effect in spectroscopic ellipsometry of thin films
title_short Spot focus size effect in spectroscopic ellipsometry of thin films
title_full Spot focus size effect in spectroscopic ellipsometry of thin films
title_fullStr Spot focus size effect in spectroscopic ellipsometry of thin films
title_full_unstemmed Spot focus size effect in spectroscopic ellipsometry of thin films
title_sort spot focus size effect in spectroscopic ellipsometry of thin films
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/57497
_version_ 1781781423167897600

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