Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser

10.1007/s00339-004-3093-0

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Bibliographic Details
Main Authors:	Lin, Y., Hong, M.H., Wang, W.J., Law, Y.Z., Chong, T.C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57548
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-575482024-11-11T08:03:20Z Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser Lin, Y. Hong, M.H. Wang, W.J. Law, Y.Z. Chong, T.C. ELECTRICAL & COMPUTER ENGINEERING NUS NANOSCIENCE & NANOTECH INITIATIVE 10.1007/s00339-004-3093-0 Applied Physics A: Materials Science and Processing 80 3 461-465 APAMF 2014-06-17T03:07:26Z 2014-06-17T03:07:26Z 2005-02 Article Lin, Y., Hong, M.H., Wang, W.J., Law, Y.Z., Chong, T.C. (2005-02). Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser. Applied Physics A: Materials Science and Processing 80 (3) : 461-465. ScholarBank@NUS Repository. https://doi.org/10.1007/s00339-004-3093-0 09478396 http://scholarbank.nus.edu.sg/handle/10635/57548 000225604800004 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00339-004-3093-0
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lin, Y. Hong, M.H. Wang, W.J. Law, Y.Z. Chong, T.C.
format	Article
author	Lin, Y. Hong, M.H. Wang, W.J. Law, Y.Z. Chong, T.C.
spellingShingle	Lin, Y. Hong, M.H. Wang, W.J. Law, Y.Z. Chong, T.C. Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser
author_sort	Lin, Y.
title	Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser
title_short	Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser
title_full	Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser
title_fullStr	Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser
title_full_unstemmed	Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser
title_sort	sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57548
_version_	1821229327198453760

Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser

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