Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry

Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry

10.1016/j.optlastec.2008.01.013

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Bibliographic Details
Main Authors: Li, M., Quan, C., Tay, C.J.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Continuous wavelet transform (CWT)
Profile measurement
Vertical scanning interferometry (VSI)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59791
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Institution: National University of Singapore
Description
Summary:10.1016/j.optlastec.2008.01.013

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