Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry

Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry

10.1016/j.optlastec.2008.01.013

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Bibliographic Details
Main Authors: Li, M., Quan, C., Tay, C.J.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Continuous wavelet transform (CWT)
Profile measurement
Vertical scanning interferometry (VSI)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59791
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Institution: National University of Singapore
id sg-nus-scholar.10635-59791
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spelling sg-nus-scholar.10635-597912023-10-25T22:59:03Z Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry Li, M. Quan, C. Tay, C.J. MECHANICAL ENGINEERING Continuous wavelet transform (CWT) Profile measurement Vertical scanning interferometry (VSI) 10.1016/j.optlastec.2008.01.013 Optics and Laser Technology 40 7 920-929 OLTCA 2014-06-17T06:15:39Z 2014-06-17T06:15:39Z 2008-10 Article Li, M., Quan, C., Tay, C.J. (2008-10). Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry. Optics and Laser Technology 40 (7) : 920-929. ScholarBank@NUS Repository. https://doi.org/10.1016/j.optlastec.2008.01.013 00303992 http://scholarbank.nus.edu.sg/handle/10635/59791 000256842600007 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Continuous wavelet transform (CWT)
Profile measurement
Vertical scanning interferometry (VSI)
spellingShingle Continuous wavelet transform (CWT)
Profile measurement
Vertical scanning interferometry (VSI)
Li, M.
Quan, C.
Tay, C.J.
Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry
description 10.1016/j.optlastec.2008.01.013
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Li, M.
Quan, C.
Tay, C.J.
format Article
author Li, M.
Quan, C.
Tay, C.J.
author_sort Li, M.
title Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry
title_short Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry
title_full Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry
title_fullStr Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry
title_full_unstemmed Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry
title_sort continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/59791
_version_ 1781781703235207168

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