Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry
10.1016/j.optlastec.2008.01.013
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Main Authors: | Li, M., Quan, C., Tay, C.J. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/59791 |
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Institution: | National University of Singapore |
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