Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices

10.1109/JMEMS.2006.872234

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Bibliographic Details
Main Authors:	Zhou, G., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Displacement sensing Grating light modulation Interferometer Microactuators Microelectromechanical systems (MEMS)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60419
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-60419
record_format	dspace
spelling	sg-nus-scholar.10635-604192024-11-14T17:55:17Z Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices Zhou, G. Chau, F.S. MECHANICAL ENGINEERING Displacement sensing Grating light modulation Interferometer Microactuators Microelectromechanical systems (MEMS) 10.1109/JMEMS.2006.872234 Journal of Microelectromechanical Systems 15 2 388-395 JMIYE 2014-06-17T06:22:59Z 2014-06-17T06:22:59Z 2006-04 Article Zhou, G., Chau, F.S. (2006-04). Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices. Journal of Microelectromechanical Systems 15 (2) : 388-395. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2006.872234 10577157 http://scholarbank.nus.edu.sg/handle/10635/60419 000236770200013 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Displacement sensing Grating light modulation Interferometer Microactuators Microelectromechanical systems (MEMS)
spellingShingle	Displacement sensing Grating light modulation Interferometer Microactuators Microelectromechanical systems (MEMS) Zhou, G. Chau, F.S. Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices
description	10.1109/JMEMS.2006.872234
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Zhou, G. Chau, F.S.
format	Article
author	Zhou, G. Chau, F.S.
author_sort	Zhou, G.
title	Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices
title_short	Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices
title_full	Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices
title_fullStr	Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices
title_full_unstemmed	Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices
title_sort	grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/60419
_version_	1821201451686297600

Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices

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