Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices
10.1109/JMEMS.2006.872234
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| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/60419 |
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| Institution: | National University of Singapore |