Grating-assisted optical microprobing of in-plane and out-of-plane displacements of microelectromechanical devices

• Main Authors: Zhou, G., Chau, F.S.
• Other Authors: MECHANICAL ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Displacement sensing; Grating light modulation; Interferometer; Microactuators; Microelectromechanical systems (MEMS)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/60419
• Institution: National University of Singapore

10.1109/JMEMS.2006.872234