Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry

Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry

10.1016/j.optcom.2006.03.008

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Bibliographic Details
Main Authors: Quan, C., Tay, C.J., Li, M.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Digital filtering
Fourier transform
Micro-cantilever
Micro-electro-mechanical systems
Vertical scanning interferometry
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60554
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Institution: National University of Singapore
id sg-nus-scholar.10635-60554
record_format dspace
spelling sg-nus-scholar.10635-605542024-11-13T04:24:38Z Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry Quan, C. Tay, C.J. Li, M. MECHANICAL ENGINEERING Digital filtering Fourier transform Micro-cantilever Micro-electro-mechanical systems Vertical scanning interferometry 10.1016/j.optcom.2006.03.008 Optics Communications 265 1 359-365 OPCOB 2014-06-17T06:24:37Z 2014-06-17T06:24:37Z 2006-09-01 Article Quan, C., Tay, C.J., Li, M. (2006-09-01). Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry. Optics Communications 265 (1) : 359-365. ScholarBank@NUS Repository. https://doi.org/10.1016/j.optcom.2006.03.008 00304018 http://scholarbank.nus.edu.sg/handle/10635/60554 000240221400052 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Digital filtering
Fourier transform
Micro-cantilever
Micro-electro-mechanical systems
Vertical scanning interferometry
spellingShingle Digital filtering
Fourier transform
Micro-cantilever
Micro-electro-mechanical systems
Vertical scanning interferometry
Quan, C.
Tay, C.J.
Li, M.
Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry
description 10.1016/j.optcom.2006.03.008
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Quan, C.
Tay, C.J.
Li, M.
format Article
author Quan, C.
Tay, C.J.
Li, M.
author_sort Quan, C.
title Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry
title_short Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry
title_full Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry
title_fullStr Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry
title_full_unstemmed Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry
title_sort inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/60554
_version_ 1821214501075156992

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