Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry

Inspection of a micro-cantilever's opened and concealed profile using integrated vertical scanning interferometry

10.1016/j.optcom.2006.03.008

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Bibliographic Details
Main Authors: Quan, C., Tay, C.J., Li, M.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Digital filtering
Fourier transform
Micro-cantilever
Micro-electro-mechanical systems
Vertical scanning interferometry
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60554
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/60554

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