Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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2014
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sg-nus-scholar.10635-607092023-08-18T09:00:59Z Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition Chen, W. Gong, H. Zeng, K. MATERIALS SCIENCE AND ENGINEERING MECHANICAL ENGINEERING Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 24 3 537-541 JVTAD 2014-06-17T06:26:25Z 2014-06-17T06:26:25Z 2006 Article Chen, W., Gong, H., Zeng, K. (2006). Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 24 (3) : 537-541. ScholarBank@NUS Repository. 07342101 http://scholarbank.nus.edu.sg/handle/10635/60709 000238091300022 Scopus |
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Singapore Singapore |
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NUS Library |
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| description |
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| author2 |
MATERIALS SCIENCE AND ENGINEERING |
| author_facet |
MATERIALS SCIENCE AND ENGINEERING Chen, W. Gong, H. Zeng, K. |
| format |
Article |
| author |
Chen, W. Gong, H. Zeng, K. |
| spellingShingle |
Chen, W. Gong, H. Zeng, K. Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| author_sort |
Chen, W. |
| title |
Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| title_short |
Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| title_full |
Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| title_fullStr |
Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| title_full_unstemmed |
Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| title_sort |
mechanical properties of cu-al-o thin films prepared by plasma-enhanced chemical vapor deposition |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/60709 |
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