Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Main Authors: | Chen, W., Gong, H., Zeng, K. |
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Other Authors: | MATERIALS SCIENCE AND ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/60709 |
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Institution: | National University of Singapore |
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