Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures

Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures

10.1088/0960-1317/18/2/025015

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Bibliographic Details
Main Authors: Tay, C.J., Quan, C., Gopal, M., Shen, L., Akkipeddi, R.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60864
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Institution: National University of Singapore
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Summary:10.1088/0960-1317/18/2/025015

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