Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures
10.1088/0960-1317/18/2/025015
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sg-nus-scholar.10635-608642023-10-30T10:07:31Z Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures Tay, C.J. Quan, C. Gopal, M. Shen, L. Akkipeddi, R. MECHANICAL ENGINEERING 10.1088/0960-1317/18/2/025015 Journal of Micromechanics and Microengineering 18 2 - JMMIE 2014-06-17T06:28:14Z 2014-06-17T06:28:14Z 2008-02-01 Article Tay, C.J., Quan, C., Gopal, M., Shen, L., Akkipeddi, R. (2008-02-01). Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures. Journal of Micromechanics and Microengineering 18 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/18/2/025015 09601317 http://scholarbank.nus.edu.sg/handle/10635/60864 000252966100015 Scopus |
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Singapore Singapore |
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| description |
10.1088/0960-1317/18/2/025015 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Tay, C.J. Quan, C. Gopal, M. Shen, L. Akkipeddi, R. |
| format |
Article |
| author |
Tay, C.J. Quan, C. Gopal, M. Shen, L. Akkipeddi, R. |
| spellingShingle |
Tay, C.J. Quan, C. Gopal, M. Shen, L. Akkipeddi, R. Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures |
| author_sort |
Tay, C.J. |
| title |
Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures |
| title_short |
Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures |
| title_full |
Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures |
| title_fullStr |
Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures |
| title_full_unstemmed |
Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures |
| title_sort |
nanoindentation techniques in the measurement of mechanical properties of inp-based free-standing mems structures |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/60864 |
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1781781930695458816 |