Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry

Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry

10.1016/j.precisioneng.2005.03.001

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Bibliographic Details
Main Authors: Quan, C., Wang, S.H., Tay, C.J.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Fast Fourier transform (FFT)
Micro-components
Non-destructive measurement
Optical interferometry
Phase-shifting technique
Piezoelectric transducer (PZT)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60870
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Institution: National University of Singapore
Description
Summary:10.1016/j.precisioneng.2005.03.001

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