Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry

10.1016/j.precisioneng.2005.03.001

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Bibliographic Details
Main Authors:	Quan, C., Wang, S.H., Tay, C.J.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Fast Fourier transform (FFT) Micro-components Non-destructive measurement Optical interferometry Phase-shifting technique Piezoelectric transducer (PZT)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60870
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-60870
record_format	dspace
spelling	sg-nus-scholar.10635-608702023-10-30T10:07:16Z Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry Quan, C. Wang, S.H. Tay, C.J. MECHANICAL ENGINEERING Fast Fourier transform (FFT) Micro-components Non-destructive measurement Optical interferometry Phase-shifting technique Piezoelectric transducer (PZT) 10.1016/j.precisioneng.2005.03.001 Precision Engineering 30 1 23-31 PREGD 2014-06-17T06:28:18Z 2014-06-17T06:28:18Z 2006-01 Article Quan, C., Wang, S.H., Tay, C.J. (2006-01). Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry. Precision Engineering 30 (1) : 23-31. ScholarBank@NUS Repository. https://doi.org/10.1016/j.precisioneng.2005.03.001 01416359 http://scholarbank.nus.edu.sg/handle/10635/60870 000233790700003 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Fast Fourier transform (FFT) Micro-components Non-destructive measurement Optical interferometry Phase-shifting technique Piezoelectric transducer (PZT)
spellingShingle	Fast Fourier transform (FFT) Micro-components Non-destructive measurement Optical interferometry Phase-shifting technique Piezoelectric transducer (PZT) Quan, C. Wang, S.H. Tay, C.J. Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry
description	10.1016/j.precisioneng.2005.03.001
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Quan, C. Wang, S.H. Tay, C.J.
format	Article
author	Quan, C. Wang, S.H. Tay, C.J.
author_sort	Quan, C.
title	Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry
title_short	Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry
title_full	Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry
title_fullStr	Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry
title_full_unstemmed	Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry
title_sort	nanoscale surface deformation inspection using fft and phase-shifting combined interferometry
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/60870
_version_	1781781931677974528

Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry

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