Surface profile measurement in white-light scanning interferometry using a three-chip color CCD

10.1364/AO.50.002246

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Main Authors: Ma, S., Quan, C., Zhu, R., Tay, C.J., Chen, L.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61435
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-614352023-10-25T23:20:52Z Surface profile measurement in white-light scanning interferometry using a three-chip color CCD Ma, S. Quan, C. Zhu, R. Tay, C.J. Chen, L. MECHANICAL ENGINEERING 10.1364/AO.50.002246 Applied Optics 50 15 2246-2254 APOPA 2014-06-17T06:35:06Z 2014-06-17T06:35:06Z 2011-05-20 Article Ma, S., Quan, C., Zhu, R., Tay, C.J., Chen, L. (2011-05-20). Surface profile measurement in white-light scanning interferometry using a three-chip color CCD. Applied Optics 50 (15) : 2246-2254. ScholarBank@NUS Repository. https://doi.org/10.1364/AO.50.002246 00036935 http://scholarbank.nus.edu.sg/handle/10635/61435 000291094300015 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1364/AO.50.002246
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Ma, S.
Quan, C.
Zhu, R.
Tay, C.J.
Chen, L.
format Article
author Ma, S.
Quan, C.
Zhu, R.
Tay, C.J.
Chen, L.
spellingShingle Ma, S.
Quan, C.
Zhu, R.
Tay, C.J.
Chen, L.
Surface profile measurement in white-light scanning interferometry using a three-chip color CCD
author_sort Ma, S.
title Surface profile measurement in white-light scanning interferometry using a three-chip color CCD
title_short Surface profile measurement in white-light scanning interferometry using a three-chip color CCD
title_full Surface profile measurement in white-light scanning interferometry using a three-chip color CCD
title_fullStr Surface profile measurement in white-light scanning interferometry using a three-chip color CCD
title_full_unstemmed Surface profile measurement in white-light scanning interferometry using a three-chip color CCD
title_sort surface profile measurement in white-light scanning interferometry using a three-chip color ccd
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/61435
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