Understanding nitrogen-induced effects on the performance of ultra low-k dielectric systems through ab initio simulations
10.1016/j.susc.2007.06.025
Saved in:
| Main Authors: | , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/61644 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-61644 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-616442023-08-29T20:19:55Z Understanding nitrogen-induced effects on the performance of ultra low-k dielectric systems through ab initio simulations Dai, L. Tan, V.B.C. Yang, S.-W. Wu, P. Chen, X.-T. MECHANICAL ENGINEERING NUS NANOSCIENCE & NANOTECH INITIATIVE ab initio Diffusion barrier Interface Low-k Nitrogen Pore-sealing 10.1016/j.susc.2007.06.025 Surface Science 601 16 3366-3371 SUSCA 2014-06-17T06:37:37Z 2014-06-17T06:37:37Z 2007-08-15 Article Dai, L., Tan, V.B.C., Yang, S.-W., Wu, P., Chen, X.-T. (2007-08-15). Understanding nitrogen-induced effects on the performance of ultra low-k dielectric systems through ab initio simulations. Surface Science 601 (16) : 3366-3371. ScholarBank@NUS Repository. https://doi.org/10.1016/j.susc.2007.06.025 00396028 http://scholarbank.nus.edu.sg/handle/10635/61644 000249282600012 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
ab initio Diffusion barrier Interface Low-k Nitrogen Pore-sealing |
| spellingShingle |
ab initio Diffusion barrier Interface Low-k Nitrogen Pore-sealing Dai, L. Tan, V.B.C. Yang, S.-W. Wu, P. Chen, X.-T. Understanding nitrogen-induced effects on the performance of ultra low-k dielectric systems through ab initio simulations |
| description |
10.1016/j.susc.2007.06.025 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Dai, L. Tan, V.B.C. Yang, S.-W. Wu, P. Chen, X.-T. |
| format |
Article |
| author |
Dai, L. Tan, V.B.C. Yang, S.-W. Wu, P. Chen, X.-T. |
| author_sort |
Dai, L. |
| title |
Understanding nitrogen-induced effects on the performance of ultra low-k dielectric systems through ab initio simulations |
| title_short |
Understanding nitrogen-induced effects on the performance of ultra low-k dielectric systems through ab initio simulations |
| title_full |
Understanding nitrogen-induced effects on the performance of ultra low-k dielectric systems through ab initio simulations |
| title_fullStr |
Understanding nitrogen-induced effects on the performance of ultra low-k dielectric systems through ab initio simulations |
| title_full_unstemmed |
Understanding nitrogen-induced effects on the performance of ultra low-k dielectric systems through ab initio simulations |
| title_sort |
understanding nitrogen-induced effects on the performance of ultra low-k dielectric systems through ab initio simulations |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/61644 |
| _version_ |
1775627968910983168 |