Yield improvement for anodic bonding with suspending structure

Yield improvement for anodic bonding with suspending structure

10.1016/j.sna.2007.11.009

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Bibliographic Details
Main Authors: Yu, H., Zhou, G., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Anodic bonding
MEMS
Snap-down
Suspending structure
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61705
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Institution: National University of Singapore
id sg-nus-scholar.10635-61705
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spelling sg-nus-scholar.10635-617052023-08-28T20:59:08Z Yield improvement for anodic bonding with suspending structure Yu, H. Zhou, G. Chau, F.S. MECHANICAL ENGINEERING Anodic bonding MEMS Snap-down Suspending structure 10.1016/j.sna.2007.11.009 Sensors and Actuators, A: Physical 143 2 462-468 SAAPE 2014-06-17T06:38:20Z 2014-06-17T06:38:20Z 2008-05-16 Article Yu, H., Zhou, G., Chau, F.S. (2008-05-16). Yield improvement for anodic bonding with suspending structure. Sensors and Actuators, A: Physical 143 (2) : 462-468. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2007.11.009 09244247 http://scholarbank.nus.edu.sg/handle/10635/61705 000255453400036 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Anodic bonding
MEMS
Snap-down
Suspending structure
spellingShingle Anodic bonding
MEMS
Snap-down
Suspending structure
Yu, H.
Zhou, G.
Chau, F.S.
Yield improvement for anodic bonding with suspending structure
description 10.1016/j.sna.2007.11.009
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Yu, H.
Zhou, G.
Chau, F.S.
format Article
author Yu, H.
Zhou, G.
Chau, F.S.
author_sort Yu, H.
title Yield improvement for anodic bonding with suspending structure
title_short Yield improvement for anodic bonding with suspending structure
title_full Yield improvement for anodic bonding with suspending structure
title_fullStr Yield improvement for anodic bonding with suspending structure
title_full_unstemmed Yield improvement for anodic bonding with suspending structure
title_sort yield improvement for anodic bonding with suspending structure
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/61705
_version_ 1775627978790666240

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