Yield improvement for anodic bonding with suspending structure

10.1016/j.sna.2007.11.009

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Bibliographic Details
Main Authors:	Yu, H., Zhou, G., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Anodic bonding MEMS Snap-down Suspending structure
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/61705
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Institution:	National University of Singapore

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