An XPS study of silicon oxynitride rapid thermally grown in nitric oxide

An XPS study of silicon oxynitride rapid thermally grown in nitric oxide

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors: Lai, W.H., Li, M.F., Pan, J.S., Liu, R., Chan, L., Chua, T.C.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61817
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Institution: National University of Singapore
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Summary:Materials Research Society Symposium - Proceedings

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