An XPS study of silicon oxynitride rapid thermally grown in nitric oxide

An XPS study of silicon oxynitride rapid thermally grown in nitric oxide

Materials Research Society Symposium - Proceedings

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Main Authors: Lai, W.H., Li, M.F., Pan, J.S., Liu, R., Chan, L., Chua, T.C.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/61817
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-618172015-01-30T07:05:18Z An XPS study of silicon oxynitride rapid thermally grown in nitric oxide Lai, W.H. Li, M.F. Pan, J.S. Liu, R. Chan, L. Chua, T.C. ELECTRICAL ENGINEERING INSTITUTE OF ENGINEERING SCIENCE Materials Research Society Symposium - Proceedings 592 171-176 MRSPD 2014-06-17T06:44:18Z 2014-06-17T06:44:18Z 2000 Article Lai, W.H.,Li, M.F.,Pan, J.S.,Liu, R.,Chan, L.,Chua, T.C. (2000). An XPS study of silicon oxynitride rapid thermally grown in nitric oxide. Materials Research Society Symposium - Proceedings 592 : 171-176. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/61817 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Materials Research Society Symposium - Proceedings
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Lai, W.H.
Li, M.F.
Pan, J.S.
Liu, R.
Chan, L.
Chua, T.C.
format Article
author Lai, W.H.
Li, M.F.
Pan, J.S.
Liu, R.
Chan, L.
Chua, T.C.
spellingShingle Lai, W.H.
Li, M.F.
Pan, J.S.
Liu, R.
Chan, L.
Chua, T.C.
An XPS study of silicon oxynitride rapid thermally grown in nitric oxide
author_sort Lai, W.H.
title An XPS study of silicon oxynitride rapid thermally grown in nitric oxide
title_short An XPS study of silicon oxynitride rapid thermally grown in nitric oxide
title_full An XPS study of silicon oxynitride rapid thermally grown in nitric oxide
title_fullStr An XPS study of silicon oxynitride rapid thermally grown in nitric oxide
title_full_unstemmed An XPS study of silicon oxynitride rapid thermally grown in nitric oxide
title_sort xps study of silicon oxynitride rapid thermally grown in nitric oxide
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/61817
_version_ 1681085662603771904

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