Investigation of capacitive coupling voltage contrast using a specimen charging model
Microelectronic Engineering
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2014
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sg-nus-scholar.10635-623532015-02-25T17:23:12Z Investigation of capacitive coupling voltage contrast using a specimen charging model Sim, K. Chan, D. Phang, J. ELECTRICAL ENGINEERING Microelectronic Engineering 24 1-4 249-256 MIENE 2014-06-17T06:50:08Z 2014-06-17T06:50:08Z 1994-03 Article Sim, K.,Chan, D.,Phang, J. (1994-03). Investigation of capacitive coupling voltage contrast using a specimen charging model. Microelectronic Engineering 24 (1-4) : 249-256. ScholarBank@NUS Repository. 01679317 http://scholarbank.nus.edu.sg/handle/10635/62353 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Microelectronic Engineering |
| author2 |
ELECTRICAL ENGINEERING |
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ELECTRICAL ENGINEERING Sim, K. Chan, D. Phang, J. |
| format |
Article |
| author |
Sim, K. Chan, D. Phang, J. |
| spellingShingle |
Sim, K. Chan, D. Phang, J. Investigation of capacitive coupling voltage contrast using a specimen charging model |
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Sim, K. |
| title |
Investigation of capacitive coupling voltage contrast using a specimen charging model |
| title_short |
Investigation of capacitive coupling voltage contrast using a specimen charging model |
| title_full |
Investigation of capacitive coupling voltage contrast using a specimen charging model |
| title_fullStr |
Investigation of capacitive coupling voltage contrast using a specimen charging model |
| title_full_unstemmed |
Investigation of capacitive coupling voltage contrast using a specimen charging model |
| title_sort |
investigation of capacitive coupling voltage contrast using a specimen charging model |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/62353 |
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1681085760251363328 |