Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates
10.1109/66.827348
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sg-nus-scholar.10635-625602015-03-31T14:37:54Z Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates Ho, W.K. Tay, A. Schaper, C.D. ELECTRICAL ENGINEERING 10.1109/66.827348 IEEE Transactions on Semiconductor Manufacturing 13 1 88-96 ITSME 2014-06-17T06:52:24Z 2014-06-17T06:52:24Z 2000 Article Ho, W.K.,Tay, A.,Schaper, C.D. (2000). Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates. IEEE Transactions on Semiconductor Manufacturing 13 (1) : 88-96. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/66.827348" target="_blank">https://doi.org/10.1109/66.827348</a> 08946507 http://scholarbank.nus.edu.sg/handle/10635/62560 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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| description |
10.1109/66.827348 |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Ho, W.K. Tay, A. Schaper, C.D. |
| format |
Article |
| author |
Ho, W.K. Tay, A. Schaper, C.D. |
| spellingShingle |
Ho, W.K. Tay, A. Schaper, C.D. Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates |
| author_sort |
Ho, W.K. |
| title |
Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates |
| title_short |
Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates |
| title_full |
Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates |
| title_fullStr |
Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates |
| title_full_unstemmed |
Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates |
| title_sort |
optimal predictive control with constraints for the processing of semiconductor wafers on bake plates |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/62560 |
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1681085798185697280 |