RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING.
Physica Status Solidi (A) Applied Research
Saved in:
Main Authors: | , , , |
---|---|
Other Authors: | |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/62702 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-62702 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-627022015-02-09T23:15:25Z RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING. Ling, C.H. Kwok, C.Y. Prasad K. ELECTRICAL ENGINEERING Physica Status Solidi (A) Applied Research 89 1 k39-k43 PSSAB 2014-06-17T06:53:57Z 2014-06-17T06:53:57Z 1985-05 Article Ling, C.H.,Kwok, C.Y.,Prasad,K. (1985-05). RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING.. Physica Status Solidi (A) Applied Research 89 (1) : k39-k43. ScholarBank@NUS Repository. 00318965 http://scholarbank.nus.edu.sg/handle/10635/62702 NOT_IN_WOS Scopus |
institution |
National University of Singapore |
building |
NUS Library |
country |
Singapore |
collection |
ScholarBank@NUS |
description |
Physica Status Solidi (A) Applied Research |
author2 |
ELECTRICAL ENGINEERING |
author_facet |
ELECTRICAL ENGINEERING Ling, C.H. Kwok, C.Y. Prasad K. |
format |
Article |
author |
Ling, C.H. Kwok, C.Y. Prasad K. |
spellingShingle |
Ling, C.H. Kwok, C.Y. Prasad K. RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING. |
author_sort |
Ling, C.H. |
title |
RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING. |
title_short |
RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING. |
title_full |
RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING. |
title_fullStr |
RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING. |
title_full_unstemmed |
RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING. |
title_sort |
relative hydrogen content in plasma-enhanced cvd silicon nitride films: substrate temperature dependence and effect of thermal annealing. |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/62702 |
_version_ |
1681085824071892992 |