RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING.

Physica Status Solidi (A) Applied Research

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Main Authors: Ling, C.H., Kwok, C.Y., Prasad, K.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62702
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-627022015-02-09T23:15:25Z RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING. Ling, C.H. Kwok, C.Y. Prasad K. ELECTRICAL ENGINEERING Physica Status Solidi (A) Applied Research 89 1 k39-k43 PSSAB 2014-06-17T06:53:57Z 2014-06-17T06:53:57Z 1985-05 Article Ling, C.H.,Kwok, C.Y.,Prasad,K. (1985-05). RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING.. Physica Status Solidi (A) Applied Research 89 (1) : k39-k43. ScholarBank@NUS Repository. 00318965 http://scholarbank.nus.edu.sg/handle/10635/62702 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Physica Status Solidi (A) Applied Research
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Ling, C.H.
Kwok, C.Y.
Prasad
K.
format Article
author Ling, C.H.
Kwok, C.Y.
Prasad
K.
spellingShingle Ling, C.H.
Kwok, C.Y.
Prasad
K.
RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING.
author_sort Ling, C.H.
title RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING.
title_short RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING.
title_full RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING.
title_fullStr RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING.
title_full_unstemmed RELATIVE HYDROGEN CONTENT IN PLASMA-ENHANCED CVD SILICON NITRIDE FILMS: SUBSTRATE TEMPERATURE DEPENDENCE AND EFFECT OF THERMAL ANNEALING.
title_sort relative hydrogen content in plasma-enhanced cvd silicon nitride films: substrate temperature dependence and effect of thermal annealing.
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/62702
_version_ 1681085824071892992