Terminal iterative learning control with an application to RTPCVD thickness control

Terminal iterative learning control with an application to RTPCVD thickness control

10.1016/S0005-1098(99)00076-X

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Bibliographic Details
Main Authors: Jian-Xin, X., Chen, Y., Tong Heng, L., Yamamoto, S.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62852
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Institution: National University of Singapore
Description
Summary:10.1016/S0005-1098(99)00076-X

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