Terminal iterative learning control with an application to RTPCVD thickness control
10.1016/S0005-1098(99)00076-X
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Main Authors: | Jian-Xin, X., Chen, Y., Tong Heng, L., Yamamoto, S. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/62852 |
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Institution: | National University of Singapore |
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