Terminal iterative learning control with an application to RTPCVD thickness control

10.1016/S0005-1098(99)00076-X

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Main Authors:	Jian-Xin, X., Chen, Y., Tong Heng, L., Yamamoto, S.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62852
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-62852
record_format	dspace
spelling	sg-nus-scholar.10635-628522023-10-30T20:40:23Z Terminal iterative learning control with an application to RTPCVD thickness control Jian-Xin, X. Chen, Y. Tong Heng, L. Yamamoto, S. ELECTRICAL ENGINEERING 10.1016/S0005-1098(99)00076-X Automatica 35 9 1535-1542 ATCAA 2014-06-17T06:55:36Z 2014-06-17T06:55:36Z 1999-09 Article Jian-Xin, X., Chen, Y., Tong Heng, L., Yamamoto, S. (1999-09). Terminal iterative learning control with an application to RTPCVD thickness control. Automatica 35 (9) : 1535-1542. ScholarBank@NUS Repository. https://doi.org/10.1016/S0005-1098(99)00076-X 00051098 http://scholarbank.nus.edu.sg/handle/10635/62852 000082187300003 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1016/S0005-1098(99)00076-X
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Jian-Xin, X. Chen, Y. Tong Heng, L. Yamamoto, S.
format	Article
author	Jian-Xin, X. Chen, Y. Tong Heng, L. Yamamoto, S.
spellingShingle	Jian-Xin, X. Chen, Y. Tong Heng, L. Yamamoto, S. Terminal iterative learning control with an application to RTPCVD thickness control
author_sort	Jian-Xin, X.
title	Terminal iterative learning control with an application to RTPCVD thickness control
title_short	Terminal iterative learning control with an application to RTPCVD thickness control
title_full	Terminal iterative learning control with an application to RTPCVD thickness control
title_fullStr	Terminal iterative learning control with an application to RTPCVD thickness control
title_full_unstemmed	Terminal iterative learning control with an application to RTPCVD thickness control
title_sort	terminal iterative learning control with an application to rtpcvd thickness control
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62852
_version_	1781782165319581696

Terminal iterative learning control with an application to RTPCVD thickness control

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