Heuristic algorithms for scheduling an automated wet-etch station

10.1016/S0098-1354(03)00192-3

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Bibliographic Details
Main Authors:	Bhushan, S., Karimi, I.A.
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Article
Published:	2014
Subjects:	Multi-product plant Resource-constrained scheduling Simulated annealing Tabu search Wafer fabrication Wet-etch station
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/64012
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-64012
record_format	dspace
spelling	sg-nus-scholar.10635-640122024-11-10T12:27:07Z Heuristic algorithms for scheduling an automated wet-etch station Bhushan, S. Karimi, I.A. CHEMICAL & BIOMOLECULAR ENGINEERING Multi-product plant Resource-constrained scheduling Simulated annealing Tabu search Wafer fabrication Wet-etch station 10.1016/S0098-1354(03)00192-3 Computers and Chemical Engineering 28 3 363-379 CCEND 2014-06-17T07:42:13Z 2014-06-17T07:42:13Z 2004-03-15 Article Bhushan, S., Karimi, I.A. (2004-03-15). Heuristic algorithms for scheduling an automated wet-etch station. Computers and Chemical Engineering 28 (3) : 363-379. ScholarBank@NUS Repository. https://doi.org/10.1016/S0098-1354(03)00192-3 00981354 http://scholarbank.nus.edu.sg/handle/10635/64012 000188549500009 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Multi-product plant Resource-constrained scheduling Simulated annealing Tabu search Wafer fabrication Wet-etch station
spellingShingle	Multi-product plant Resource-constrained scheduling Simulated annealing Tabu search Wafer fabrication Wet-etch station Bhushan, S. Karimi, I.A. Heuristic algorithms for scheduling an automated wet-etch station
description	10.1016/S0098-1354(03)00192-3
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING Bhushan, S. Karimi, I.A.
format	Article
author	Bhushan, S. Karimi, I.A.
author_sort	Bhushan, S.
title	Heuristic algorithms for scheduling an automated wet-etch station
title_short	Heuristic algorithms for scheduling an automated wet-etch station
title_full	Heuristic algorithms for scheduling an automated wet-etch station
title_fullStr	Heuristic algorithms for scheduling an automated wet-etch station
title_full_unstemmed	Heuristic algorithms for scheduling an automated wet-etch station
title_sort	heuristic algorithms for scheduling an automated wet-etch station
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/64012
_version_	1821210010273710080

Heuristic algorithms for scheduling an automated wet-etch station

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