Heuristic algorithms for scheduling an automated wet-etch station

10.1016/S0098-1354(03)00192-3

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Bibliographic Details
Main Authors:	Bhushan, S., Karimi, I.A.
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Article
Published:	2014
Subjects:	Multi-product plant Resource-constrained scheduling Simulated annealing Tabu search Wafer fabrication Wet-etch station
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/64012
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Institution:	National University of Singapore

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