Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates

10.1063/1.2642619

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Bibliographic Details
Main Authors:	Vicknesh, S., Tripathy, S., Lin, V.K.X., Chua, S.J., Kumar, B., Gong, H.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/65021
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Institution:	National University of Singapore

Description
Summary:	10.1063/1.2642619

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