Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates
10.1063/1.2642619
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Main Authors: | Vicknesh, S., Tripathy, S., Lin, V.K.X., Chua, S.J., Kumar, B., Gong, H. |
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Other Authors: | MATERIALS SCIENCE AND ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/65021 |
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Institution: | National University of Singapore |
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