Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates

10.1063/1.2642619

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Bibliographic Details
Main Authors:	Vicknesh, S., Tripathy, S., Lin, V.K.X., Chua, S.J., Kumar, B., Gong, H.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/65021
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-65021
record_format	dspace
spelling	sg-nus-scholar.10635-650212023-10-30T09:44:12Z Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates Vicknesh, S. Tripathy, S. Lin, V.K.X. Chua, S.J. Kumar, B. Gong, H. MATERIALS SCIENCE AND ENGINEERING 10.1063/1.2642619 Applied Physics Letters 90 9 - APPLA 2014-06-17T08:00:14Z 2014-06-17T08:00:14Z 2007 Article Vicknesh, S., Tripathy, S., Lin, V.K.X., Chua, S.J., Kumar, B., Gong, H. (2007). Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates. Applied Physics Letters 90 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2642619 00036951 http://scholarbank.nus.edu.sg/handle/10635/65021 000244591700033 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.2642619
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING Vicknesh, S. Tripathy, S. Lin, V.K.X. Chua, S.J. Kumar, B. Gong, H.
format	Article
author	Vicknesh, S. Tripathy, S. Lin, V.K.X. Chua, S.J. Kumar, B. Gong, H.
spellingShingle	Vicknesh, S. Tripathy, S. Lin, V.K.X. Chua, S.J. Kumar, B. Gong, H. Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates
author_sort	Vicknesh, S.
title	Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates
title_short	Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates
title_full	Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates
title_fullStr	Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates
title_full_unstemmed	Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates
title_sort	surface micromachined freestanding zno microbridge and cantilever structures on si(111) substrates
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/65021
_version_	1781782547344130048

Surface micromachined freestanding ZnO microbridge and cantilever structures on Si(111) substrates

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