GaN and ZnO freestanding micromechanical structures on silicon-on-insulator substrates

GaN and ZnO freestanding micromechanical structures on silicon-on-insulator substrates

10.1002/pssa.200723611

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Bibliographic Details
Main Authors: Tripathy, S., Vicknesh, S., Wang, L.S., Lin, V.K.X., Oh, S.A., Grover, R., Zang, K.Y., Arokiaraj, J., Tan, J.N., Kumar, B., Gong, H., Shannigrahi, S.R., Ramam, A., Chua, S.J.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/86365
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/86365

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