GaN and ZnO freestanding micromechanical structures on silicon-on-insulator substrates
10.1002/pssa.200723611
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Main Authors: | Tripathy, S., Vicknesh, S., Wang, L.S., Lin, V.K.X., Oh, S.A., Grover, R., Zang, K.Y., Arokiaraj, J., Tan, J.N., Kumar, B., Gong, H., Shannigrahi, S.R., Ramam, A., Chua, S.J. |
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Other Authors: | MATERIALS SCIENCE AND ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/86365 |
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Institution: | National University of Singapore |
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