GaN and ZnO freestanding micromechanical structures on silicon-on-insulator substrates

• Main Authors: Tripathy, S., Vicknesh, S., Wang, L.S., Lin, V.K.X., Oh, S.A., Grover, R., Zang, K.Y., Arokiaraj, J., Tan, J.N., Kumar, B., Gong, H., Shannigrahi, S.R., Ramam, A., Chua, S.J.
• Other Authors: MATERIALS SCIENCE AND ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/86365
• Institution: National University of Singapore

10.1002/pssa.200723611