Via resistance reduction using "cool" PVD-Ta processing

10.1149/1.1621417

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Bibliographic Details
Main Authors:	Seet, C.S., Zhang, B.C., Yong, C., Liew, S.L., Li, K., Hsia, L.C., Seng, H.L., Osiposwicz, T., Sudijono, J., Zeng, H.C., Tan, J.B.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/66899
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-66899
record_format	dspace
spelling	sg-nus-scholar.10635-668992023-10-30T08:14:52Z Via resistance reduction using "cool" PVD-Ta processing Seet, C.S. Zhang, B.C. Yong, C. Liew, S.L. Li, K. Hsia, L.C. Seng, H.L. Osiposwicz, T. Sudijono, J. Zeng, H.C. Tan, J.B. PHYSICS CHEMICAL & ENVIRONMENTAL ENGINEERING 10.1149/1.1621417 Journal of the Electrochemical Society 150 12 G766-G770 JESOA 2014-06-17T08:35:45Z 2014-06-17T08:35:45Z 2003-12 Article Seet, C.S., Zhang, B.C., Yong, C., Liew, S.L., Li, K., Hsia, L.C., Seng, H.L., Osiposwicz, T., Sudijono, J., Zeng, H.C., Tan, J.B. (2003-12). Via resistance reduction using "cool" PVD-Ta processing. Journal of the Electrochemical Society 150 (12) : G766-G770. ScholarBank@NUS Repository. https://doi.org/10.1149/1.1621417 00134651 http://scholarbank.nus.edu.sg/handle/10635/66899 000186902400048 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1149/1.1621417
author2	PHYSICS
author_facet	PHYSICS Seet, C.S. Zhang, B.C. Yong, C. Liew, S.L. Li, K. Hsia, L.C. Seng, H.L. Osiposwicz, T. Sudijono, J. Zeng, H.C. Tan, J.B.
format	Article
author	Seet, C.S. Zhang, B.C. Yong, C. Liew, S.L. Li, K. Hsia, L.C. Seng, H.L. Osiposwicz, T. Sudijono, J. Zeng, H.C. Tan, J.B.
spellingShingle	Seet, C.S. Zhang, B.C. Yong, C. Liew, S.L. Li, K. Hsia, L.C. Seng, H.L. Osiposwicz, T. Sudijono, J. Zeng, H.C. Tan, J.B. Via resistance reduction using "cool" PVD-Ta processing
author_sort	Seet, C.S.
title	Via resistance reduction using "cool" PVD-Ta processing
title_short	Via resistance reduction using "cool" PVD-Ta processing
title_full	Via resistance reduction using "cool" PVD-Ta processing
title_fullStr	Via resistance reduction using "cool" PVD-Ta processing
title_full_unstemmed	Via resistance reduction using "cool" PVD-Ta processing
title_sort	via resistance reduction using "cool" pvd-ta processing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/66899
_version_	1781782747401945088

Via resistance reduction using "cool" PVD-Ta processing

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