Out-of-plane electrostatic actuation of microcantilevers

10.1088/0957-4484/16/4/045

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Main Authors:	O'Shea, S.J., Lu, P., Shen, F., Neuzil, P., Zhang, Q.X.
Other Authors:	BIOENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/67209
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-67209
record_format	dspace
spelling	sg-nus-scholar.10635-672092023-09-21T21:13:37Z Out-of-plane electrostatic actuation of microcantilevers O'Shea, S.J. Lu, P. Shen, F. Neuzil, P. Zhang, Q.X. BIOENGINEERING 10.1088/0957-4484/16/4/045 Nanotechnology 16 4 602-608 NNOTE 2014-06-17T09:45:46Z 2014-06-17T09:45:46Z 2005-04 Article O'Shea, S.J., Lu, P., Shen, F., Neuzil, P., Zhang, Q.X. (2005-04). Out-of-plane electrostatic actuation of microcantilevers. Nanotechnology 16 (4) : 602-608. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-4484/16/4/045 09574484 http://scholarbank.nus.edu.sg/handle/10635/67209 000228949300054 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1088/0957-4484/16/4/045
author2	BIOENGINEERING
author_facet	BIOENGINEERING O'Shea, S.J. Lu, P. Shen, F. Neuzil, P. Zhang, Q.X.
format	Article
author	O'Shea, S.J. Lu, P. Shen, F. Neuzil, P. Zhang, Q.X.
spellingShingle	O'Shea, S.J. Lu, P. Shen, F. Neuzil, P. Zhang, Q.X. Out-of-plane electrostatic actuation of microcantilevers
author_sort	O'Shea, S.J.
title	Out-of-plane electrostatic actuation of microcantilevers
title_short	Out-of-plane electrostatic actuation of microcantilevers
title_full	Out-of-plane electrostatic actuation of microcantilevers
title_fullStr	Out-of-plane electrostatic actuation of microcantilevers
title_full_unstemmed	Out-of-plane electrostatic actuation of microcantilevers
title_sort	out-of-plane electrostatic actuation of microcantilevers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/67209
_version_	1779169570490155008

Out-of-plane electrostatic actuation of microcantilevers

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