A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators

A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators

10.1109/JSTQE.2009.2022959

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Bibliographic Details
Main Authors: Lee, C., Hsiao, F.-L., Kobayashi, T., Koh, K.H., Ramana, P.V., Xiang, W., Yang, B., Tan, C.W., Pinjala, D.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Microelectromechanical systems (MEMS)
Mirror
Optical MEMS
Piezoelectric actuator
PZT
Variable optical attenuators (VOAs)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68706
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Institution: National University of Singapore
Description
Summary:10.1109/JSTQE.2009.2022959

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