A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators

• Main Authors: Lee, C., Hsiao, F.-L., Kobayashi, T., Koh, K.H., Ramana, P.V., Xiang, W., Yang, B., Tan, C.W., Pinjala, D.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Microelectromechanical systems (MEMS); Mirror; Optical MEMS; Piezoelectric actuator; PZT; Variable optical attenuators (VOAs)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/68706
• Institution: National University of Singapore

10.1109/JSTQE.2009.2022959