A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators

10.1109/JSTQE.2009.2022959

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Bibliographic Details
Main Authors:	Lee, C., Hsiao, F.-L., Kobayashi, T., Koh, K.H., Ramana, P.V., Xiang, W., Yang, B., Tan, C.W., Pinjala, D.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Microelectromechanical systems (MEMS) Mirror Optical MEMS Piezoelectric actuator PZT Variable optical attenuators (VOAs)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/68706
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-68706
record_format	dspace
spelling	sg-nus-scholar.10635-687062023-09-22T07:36:24Z A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators Lee, C. Hsiao, F.-L. Kobayashi, T. Koh, K.H. Ramana, P.V. Xiang, W. Yang, B. Tan, C.W. Pinjala, D. ELECTRICAL & COMPUTER ENGINEERING Microelectromechanical systems (MEMS) Mirror Optical MEMS Piezoelectric actuator PZT Variable optical attenuators (VOAs) 10.1109/JSTQE.2009.2022959 IEEE Journal on Selected Topics in Quantum Electronics 15 5 1529-1536 IJSQE 2014-06-19T02:52:18Z 2014-06-19T02:52:18Z 2009-09 Conference Paper Lee, C., Hsiao, F.-L., Kobayashi, T., Koh, K.H., Ramana, P.V., Xiang, W., Yang, B., Tan, C.W., Pinjala, D. (2009-09). A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators. IEEE Journal on Selected Topics in Quantum Electronics 15 (5) : 1529-1536. ScholarBank@NUS Repository. https://doi.org/10.1109/JSTQE.2009.2022959 1077260X http://scholarbank.nus.edu.sg/handle/10635/68706 000270950300034 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Microelectromechanical systems (MEMS) Mirror Optical MEMS Piezoelectric actuator PZT Variable optical attenuators (VOAs)
spellingShingle	Microelectromechanical systems (MEMS) Mirror Optical MEMS Piezoelectric actuator PZT Variable optical attenuators (VOAs) Lee, C. Hsiao, F.-L. Kobayashi, T. Koh, K.H. Ramana, P.V. Xiang, W. Yang, B. Tan, C.W. Pinjala, D. A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators
description	10.1109/JSTQE.2009.2022959
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lee, C. Hsiao, F.-L. Kobayashi, T. Koh, K.H. Ramana, P.V. Xiang, W. Yang, B. Tan, C.W. Pinjala, D.
format	Conference or Workshop Item
author	Lee, C. Hsiao, F.-L. Kobayashi, T. Koh, K.H. Ramana, P.V. Xiang, W. Yang, B. Tan, C.W. Pinjala, D.
author_sort	Lee, C.
title	A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators
title_short	A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators
title_full	A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators
title_fullStr	A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators
title_full_unstemmed	A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators
title_sort	1-v operated mems variable optical attenuator using piezoelectric pzt thin-film actuators
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/68706
_version_	1781783057931436032

A 1-V operated MEMS variable optical attenuator using piezoelectric PZT thin-film actuators

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