A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators

A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators

10.1016/j.proeng.2010.09.184

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Bibliographic Details
Main Authors: Koh, K.H., Lee, C., Kobayashi, T.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Microelectromechanical Systems (MEMS)
Optical MEMS
Piezoelectric actuator
Variable optical attenuator (VOA)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68708
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Institution: National University of Singapore
Description
Summary:10.1016/j.proeng.2010.09.184

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