A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators
10.1016/j.proeng.2010.09.184
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Main Authors: | Koh, K.H., Lee, C., Kobayashi, T. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/68708 |
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Institution: | National University of Singapore |
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