A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators

10.1016/j.proeng.2010.09.184

Saved in:

Bibliographic Details
Main Authors:	Koh, K.H., Lee, C., Kobayashi, T.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Microelectromechanical Systems (MEMS) Optical MEMS Piezoelectric actuator Variable optical attenuator (VOA)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/68708
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-68708
record_format	dspace
spelling	sg-nus-scholar.10635-687082023-10-26T08:45:36Z A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators Koh, K.H. Lee, C. Kobayashi, T. ELECTRICAL & COMPUTER ENGINEERING Microelectromechanical Systems (MEMS) Optical MEMS Piezoelectric actuator Variable optical attenuator (VOA) 10.1016/j.proeng.2010.09.184 Procedia Engineering 5 613-616 2014-06-19T02:52:20Z 2014-06-19T02:52:20Z 2010 Conference Paper Koh, K.H., Lee, C., Kobayashi, T. (2010). A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators. Procedia Engineering 5 : 613-616. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2010.09.184 18777058 http://scholarbank.nus.edu.sg/handle/10635/68708 000287162400152 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Microelectromechanical Systems (MEMS) Optical MEMS Piezoelectric actuator Variable optical attenuator (VOA)
spellingShingle	Microelectromechanical Systems (MEMS) Optical MEMS Piezoelectric actuator Variable optical attenuator (VOA) Koh, K.H. Lee, C. Kobayashi, T. A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators
description	10.1016/j.proeng.2010.09.184
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Lee, C. Kobayashi, T.
format	Conference or Workshop Item
author	Koh, K.H. Lee, C. Kobayashi, T.
author_sort	Koh, K.H.
title	A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators
title_short	A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators
title_full	A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators
title_fullStr	A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators
title_full_unstemmed	A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators
title_sort	3-d mems voa using translational attenuation mechanism based on piezoelectric pzt thin film actuators
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/68708
_version_	1781783058347720704

A 3-D MEMS VOA using translational attenuation mechanism based on piezoelectric PZT thin film actuators

Similar Items