A novel wafer baking system using hot air streams

10.1117/12.534753

Saved in:

Bibliographic Details
Main Authors:	Lan, W., Loong, C.S., Poh, L.A., Ming, G.Z., Wan, T.W., Tay, A., Khuen, H.W.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Lithography Post exposure bake (PEB) Temperature uniformity Wafer-baking process
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/68996
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-68996
record_format	dspace
spelling	sg-nus-scholar.10635-689962023-10-27T09:01:53Z A novel wafer baking system using hot air streams Lan, W. Loong, C.S. Poh, L.A. Ming, G.Z. Wan, T.W. Tay, A. Khuen, H.W. ELECTRICAL & COMPUTER ENGINEERING Lithography Post exposure bake (PEB) Temperature uniformity Wafer-baking process 10.1117/12.534753 Proceedings of SPIE - The International Society for Optical Engineering 5376 PART 2 1233-1242 PSISD 2014-06-19T02:55:38Z 2014-06-19T02:55:38Z 2004 Conference Paper Lan, W., Loong, C.S., Poh, L.A., Ming, G.Z., Wan, T.W., Tay, A., Khuen, H.W. (2004). A novel wafer baking system using hot air streams. Proceedings of SPIE - The International Society for Optical Engineering 5376 (PART 2) : 1233-1242. ScholarBank@NUS Repository. https://doi.org/10.1117/12.534753 0277786X http://scholarbank.nus.edu.sg/handle/10635/68996 000222468500137 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Lithography Post exposure bake (PEB) Temperature uniformity Wafer-baking process
spellingShingle	Lithography Post exposure bake (PEB) Temperature uniformity Wafer-baking process Lan, W. Loong, C.S. Poh, L.A. Ming, G.Z. Wan, T.W. Tay, A. Khuen, H.W. A novel wafer baking system using hot air streams
description	10.1117/12.534753
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lan, W. Loong, C.S. Poh, L.A. Ming, G.Z. Wan, T.W. Tay, A. Khuen, H.W.
format	Conference or Workshop Item
author	Lan, W. Loong, C.S. Poh, L.A. Ming, G.Z. Wan, T.W. Tay, A. Khuen, H.W.
author_sort	Lan, W.
title	A novel wafer baking system using hot air streams
title_short	A novel wafer baking system using hot air streams
title_full	A novel wafer baking system using hot air streams
title_fullStr	A novel wafer baking system using hot air streams
title_full_unstemmed	A novel wafer baking system using hot air streams
title_sort	novel wafer baking system using hot air streams
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/68996
_version_	1781783077697093632

A novel wafer baking system using hot air streams

Similar Items