A thermoelectricity-lamp based integrated bake/chill system for photoresist processing

10.1109/IECON.2005.1568896

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Bibliographic Details
Main Authors:	Tay, A., Chua, H.-T., Ho, W.-S., Zhou, Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69105
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Institution:	National University of Singapore

Description
Summary:	10.1109/IECON.2005.1568896

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