A thermoelectricity-lamp based integrated bake/chill system for photoresist processing

10.1109/IECON.2005.1568896

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Bibliographic Details
Main Authors:	Tay, A., Chua, H.-T., Ho, W.-S., Zhou, Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69105
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-69105
record_format	dspace
spelling	sg-nus-scholar.10635-691052015-01-09T01:16:49Z A thermoelectricity-lamp based integrated bake/chill system for photoresist processing Tay, A. Chua, H.-T. Ho, W.-S. Zhou, Y. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IECON.2005.1568896 IECON Proceedings (Industrial Electronics Conference) 2005 153-158 IEPRE 2014-06-19T02:56:53Z 2014-06-19T02:56:53Z 2005 Conference Paper Tay, A.,Chua, H.-T.,Ho, W.-S.,Zhou, Y. (2005). A thermoelectricity-lamp based integrated bake/chill system for photoresist processing. IECON Proceedings (Industrial Electronics Conference) 2005 : 153-158. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IECON.2005.1568896" target="_blank">https://doi.org/10.1109/IECON.2005.1568896</a> 0780392523 http://scholarbank.nus.edu.sg/handle/10635/69105 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/IECON.2005.1568896
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tay, A. Chua, H.-T. Ho, W.-S. Zhou, Y.
format	Conference or Workshop Item
author	Tay, A. Chua, H.-T. Ho, W.-S. Zhou, Y.
spellingShingle	Tay, A. Chua, H.-T. Ho, W.-S. Zhou, Y. A thermoelectricity-lamp based integrated bake/chill system for photoresist processing
author_sort	Tay, A.
title	A thermoelectricity-lamp based integrated bake/chill system for photoresist processing
title_short	A thermoelectricity-lamp based integrated bake/chill system for photoresist processing
title_full	A thermoelectricity-lamp based integrated bake/chill system for photoresist processing
title_fullStr	A thermoelectricity-lamp based integrated bake/chill system for photoresist processing
title_full_unstemmed	A thermoelectricity-lamp based integrated bake/chill system for photoresist processing
title_sort	thermoelectricity-lamp based integrated bake/chill system for photoresist processing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/69105
_version_	1681086952757002240

A thermoelectricity-lamp based integrated bake/chill system for photoresist processing

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