A heater plate assisted integrated bake/chill system for photoresist processing

A heater plate assisted integrated bake/chill system for photoresist processing

10.1117/12.711688

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Bibliographic Details
Main Authors: Chua, H.-T., Tay, A., Wang, Y., Wu, X.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Lithography
Mica heater
Temperature control
Thermoelectric
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73030
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/73030

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